The study of magnetic films grown on the oxidized silicon surface is of interest from the point of view of creating "ferromagnetic metal/dielectric" tunnel contacts and implementing the transport of spin-polarized electrons. In this work, textured polycrystalline magnetite films were prepared by reactive deposition of iron onto a SiO₂/Si(001) surface under a molecular oxygen atmosphere. Films with a thickness of 15-250 nm were studied using Raman spectroscopy and X-ray diffraction. From the analysis of experimental data, it was established that as a result of reactive deposition, magnetite crystallites grow predominantly in two orientations - (311) and (100). The crystallite lattice constant does not depend on the film thickness, but its value is ~1% less than for single-crystal magnetite. Studies of magnetic properties have shown that the magnetic behavior of samples greatly changes its character in samples with a magnetite film thickness of less than 70 nm. Keywords: magnetite, texture, silicon, reactive deposition, Raman spectroscopy.