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Investigation of the surface layer formed during the processing of quartz glass using mechanochemical and ionic polishing
Russian version
DOI: 10.21883/EOS.2022.12.55249.42-22
Zolotarev V. M1
1 ITMO University, St. Petersburg, Russia
Email: vm-zolotarev@mail.ru
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Quantitative studies of the optical parameters of the surface layer formed during the polishing of quartz glass have been carried out. It is shown that the mechanism of formation of the surface layer when using the methods of mechanochemical and ion polishing has much in common. In both cases, the appearance of a surface layer, which differs by a high refractive index from the corresponding bulk properties of glass, is associated with the stress and breaking of the Si-O-Si bridge bonds during hydrolysis during glass polishing. The hydrolysis of Si-O-Si bonds is associated with the formation of Si-O and Si-OH groups, which leads to an increase in the refractive index of the surface layer. Keywords: surface layer, quartz glass, mechanochemical and ionic polishing, formation of Si-O and Si-OH groups.
  1. Lord Rayleigh. Proc. Royal Soc. London A, 60, 507 (1937)
  2. I.V. Grebenshchikov. Izv. AN SSSR. Sektsiya tekhn. nauk, (1), 3, (1937).(In Russian)
  3. N. Kachalov. Osnovy protsessov shlifovki i polirovki stekla (Publ. house AS of the USSR, M., 1946) (in Russian)
  4. A. Adamson. Fizicheskaya khimiya poverkhnostey (Mir, Moscow, 1979) (in Russian)
  5. T.N. Krylova. Vavilov State Optical Institute 45 (179), 47, (1979) (in Russian)
  6. E.Ya. Goz, R.S. Sokolova, A.Ya. Kuznetsov. OMP, (12), 69 (1969). (in Russian)
  7. J.G. Smith, J. Hooley. Canadian J. Technol., 31 (2/3), 37 (1973)
  8. A. Kuller. Silicattechnik, 7 (10), 380 (1956)
  9. G.O. Rawstron. J. Soc. Glass Technol., 42, 253 (1958)
  10. H. Komogava. Proc. Phys. Math. Soc. Japan, 8, 384 (1943)
  11. S. Harada, T. Isumitani. Glass Technol., 12 (5), 131 (1971)
  12. H. Sakata. Verres Refract, 12 (2), 58 (1973)
  13. J.P. Mariage. Neuv. Rev. Optique, 6 (2), 121 (1975)
  14. Y. Yokota, H. Sakata, M. Nishibori, K. Kinosita. Surf. Sci., 16, 265 (1969)
  15. A.E. Chmel, V.I. Vettegren, K.N. Kuksenko. In: Opticheskiye i spektral'nyye svoystva stekol (abs. 3rd All-Union. sympos., State Optical InstituteI, Leningrad, 1974), pp. 45-46, (in Russian)
  16. V.I. Pshenitsyn, N.Kh. Holdarov, I.A. Khramtsovsky, M.A. Kalinina, N.I. Tikhomirova. OMP, (8), 28 (1987). (in Russian)
  17. V.I. Pshenitsyn, G.T. Petrovsky, V.N. Stepanchuk. In: Nerazrushayushchiye fizicheskiye metody i sredstva kontrolya (abs. 9th All-Union. scientific and technical Conf., Minsk, May 26-28, 1981), p. 161 (in Russian)
  18. H. Fukyo, N. Oura, N. Kitajiama, H. Kono. J. Appl. Phys., 50 (5), 3653 (1979)
  19. J.C. Channet, P.G. de Gennes. J. Opt. Soc. Am., 73 (12), 1777 (1983)
  20. L.L. Vasilyeva, K.K. Svitashev, A.I. Semenenko, L.V. Semenenko, V.K. Sokolov. Opt. i spektr., 37 (3), 574 (1974) (in Russian)
  21. Z. Gu, P. Liang, W. Zhang. Optical Engineering, 41 (7), (2002). DOI: 10.1117/1.1480426
  22. I.H. Malitson. JOSA, 55, 1205 (1965)
  23. A.I. Semenenko. Nauch. priborostr., 15 (2), 88 2005 (in Russian)
  24. G.M. Mansurov, R.K. Mamedov, A.S. Sudarushkin et al. Opt. i spektr., 52 (5), 852 (1982) (in Russian)
  25. V.A. Bershteyn. Mekhano-gidroliticheskiye protsessy i prochnost' tverdykh tel (Nauka, Leningrad, 1987) (1982) (in Russian)
  26. A.M. Efimov, V.G. Pogareva, V.N. Parfinskii, M.A. Okatov, V.A. Tolmachev. Glass Technology, 46 (1), 20 (2005)
  27. V.M. Zolotarev. Opt. i spektr., 107 (5), 794 (2009) (in Russian)
  28. R. Kitamura, L. Pilon, M. Jonasz. Appl. Opt., 46 (33), 8118 (2007)
  29. G. Carter, J.S. Colligon. Ion Bombardment of Solids (Amer. Elsevier Pub. Co., N.Y., 1968)
  30. P. Sigmund. Raspyleniye tverdykh tel ionnoy bombardirovkoy (Mir, Moscow, 1984) (in Russian)
  31. P. Sigmund. Phys. Rev., 187, 768 (1969). DOI: 10.1103/PhysRev.184.383
  32. A.F. Perveev, A.V. Mikhailov, V.V. Ilyin. OMP, (10), 40 (1972).(in Russian)
  33. A.F. Perveyev, L.V. Vishnevskaya, L.A. Cherezova. Ionnaya obrabotka opticheskikh materialov i pokrytiy (NTTS "Informatika", Moskva, 1990) (in Russian)
  34. L.A. Cherezova. Optich. zhurn., 67 (10), 1 (2000) .(in Russian)
  35. I.A. Khramtsovsky, T.K. Voshchenko, L.A. Cherezova, V.I. Pshenitsyn, A.A. Apinov. Opt. i spektr., 65 (1), 141 (1988) (in Russian)
  36. N.I. Chkhalo, S.A. Churin, M.S. Mikhaylenko et al. Appl. Opt., 55 (6), 1249 (2016). DOI: 10.1364/AO.55.001249
  37. A. Keller, S. Facsko, W. Moller. J. Phys.: Condens. Matter, 21, 495305 (2009). DOI: 10.1088/0953-8984/21/49/495305
  38. Y. Zhong, F. Shi, Y. Tian, Y. Dai, C. Song, W. Zhang, Z. Lin. Opt. Expr., 27 (8), 10826 (2019). DOI: 10.1364/OE.27.010826
  39. P.E. Miller, T.I. Suratwala, L.L. Wong, M.D. Feit, J.A. Menapace, P.J. Davis, R.A. Steele. In: Laser-Induced Damage in Optical Materials (Proc. SPIE, 5991, 2005). DOI: 10.1117/12.638821
  40. N.N. Rozanov, V.M. Zolotarev. Opt. i spektr., 49 (5), 925 (1980) (in Russian)
  41. G.M. Mansurov, N.N. Rozanov, V.M. Zolotarev, S.M. Sutovsky. Opt. i spektr., 53 (5), 301 (1982) (in Russian)
  42. V.M. Zolotarev. Issledovaniye svoystv materialov v ob"yeme i surface layer by methods of internal reflection spectroscopy (Vavilov State Optical Institute, Leningrad, 1981) (in Russian)
  43. E.D. Palik, R.T. Holm. Optical Eng., 17 (5), 512 (1978)
  44. N.J. Harrick. Internal Reflection Spectroscopy (Wiley, NY, 1967)
  45. I.M. Minkov, E.L. Velitskaya, V.M. Zolotarev, L.N. Kapitonova. Opt. i spektr., 58 (689) (1995) (in Russian)
  46. S.S. Gusev, N.I. Staskov, V.V. Filippov. Opt. i spektr., 49 (1), 117 (1980) (in Russian)
  47. Handbook of Optical Constants of Solids, ed. by E.D. Palik (Acad. Pr., NY, 1985)
  48. V.M. Zolotarev, V.N. Morozov, Ye.V. Smirnova. Opticheskiye postoyannyye prirodnykh i tekhnicheskikh sred (Khimiya, Leningrad, 1984) (in Russian)
  49. A.M. Efimov. Optical Constants of Inorganic Glasses (CRC Press, Boca Raton, 1995)
  50. L. Alipour, S. Nakashima. Appl. Spectr., 70 (3), (2016). DOI: 10.1177/0003702815626665
  51. Fu Huiqin, Ding Xingeng et al. RSC Adv., 7 (27), 16264 (2017). DOI: 10.1039/C6RA27219C
  52. S. Wetzel, M. Klevenz, H-P. Gail et. al. A \& A, 553 (A92), 1 (2013). DOI: 10.1051/0004-6361/201220803
  53. M. Tomozawa, Y-K. Lee, Y-L. Peng. J. Non-Cryst. Sol., 242 (2-3), 104 (1998)
  54. V.I. Kurban', T.T. Skripko et all Sinteticheskiye almazy, (3), 5 (2001) (in Russian)
  55. M. Polyanskiy. Refractive Index. INFO website: 2008-2022 (Electronic source) https://refractiveindex.info/
  56. T.R. Steyer, K.L. Day, D.R. Huffman. Appl. Opt., 13, 1586 (1974). DOI: 10.1364/AO.13.001586
  57. A.I. Stogniy, H.H. Novitskiy, O.M. Stukalov. Pisma v ZhTF, 28(1), 39 (2002) (in Russian)
  58. N.N. Andrianova, A.M. Borisov, V.V. Borovskaya. Prikl. fizika, 2, 36 (2012). (in Russian)
  59. Y. Zhong, Y. Dai, F. Shi, C. Song, Y. Tian, Z. Lin, W. Zhang, Y. Shen. Materials, 13 (6), 1294 (2020). DOI: 10.3390/ma13061294

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