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Emission spectra of molecular gases CHF3, CCl2F2, SF6 in the range 3-20 nm under pulsed laser excitation using various gas jets as targets
Russian version
DOI: 10.21883/EOS.2022.02.53209.2771-21
Guseva V. E.1, Nechay A. N.2, Perekalov A. A.2, Salashchenko N. N.2, Chkhalo N. I.2
1Lobachevsky State University, Nizhny Novgorod, Russia
2Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia
Email: nechay@ipmras.ru, perekalov@ipmras.ru
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The article considers the results of studies of the emission spectra of CHF3, CCl2F2, SF6 upon excitation by pulsed laser radiation. We used Nd : YAG laser, λ = 1064 nm, tau = 5 ns, and Epulse = 0.8 J. The spectral range of 3-20 nm was studied. We used capillary and supersonic conical nozzles with dcrit = 145 μm, 2α = 12o, L = 5 mm, and dcrit = 450 μm, 2α = 11o, L = 5 mm to form an atomic cluster beam. The emission spectra for various gas targets were obtained, the obtained spectra were deciphered, and the ions emitting in this spectral range were determined. We observed that with increasing particle concentration in the zone of laser spark, the radiation intensity increases. In this case, the intensity of ion lines with high degrees of ionization increases faster. Keywords: cluster beams, extreme ultraviolet radiation, emission spectra, laser spark, x-ray spectrometer-monochromator.
  1. S.V. Kuzin, V.N. Polkovnikov, N.N. Salashchenko. Izvestiya RAN. Ser. fiz., 75 (1), 88 (2011) (in Russian)
  2. N.I. Chkhalo, N.N. Salashchenko. AIP Adv., 3 (8), 082130 (2013)
  3. M.M. Barysheva, A.E. Pestov, N.N. Salashchenko, M.N. Toropov, N.I. Chkhalo. UFN, 182 (7), 727 (2012) (in Russian)
  4. I.V. Malyshev, A.E. Pestov, V.N. Polkovnikov, N.N. Salashchenko, M.N. Toropov, N.I. Chkhalo. Poverkhnost. Rentgenovskie, sinhrotronnye i nejtronnye issledovaniya 1, 3 (2019) (in Russian)
  5. M. Suzuki, H. Daido, I.W. Choi, W. Yu, K. Nagai, T. Norimatsu, H. Fiedorowicz. Phys. Plasm., 10 (1), 227 (2003)
  6. M.B. Smirnov, W. Becker Phys. Rev. A, 74 (1), 013201 (2006)
  7. N.I. Chkhalo, S.A. Garakhin, S.V. Golubev, A.Ya. Lopatin, A.N. Nechay, A.E. Pestov, N.N. Salashchenko, M.N. Toropov, N.N. Tsybin, A.V. Vodopyanov, S. Yulin. Appl. Phys. Lett., 112 (22), 221101 (2018)
  8. H. Fiedorowicz, A. Bartnik, M. Szczurek, H. Daido, N. Sakaya, V. Kmetik, T. Wilhein. Opt. Commun., 163 (1-3), 103 (1999)
  9. Y. Tao, M.S. Tillack, K.L. Sequoia, R.A. Burdt, S. Yuspeh, F. Najmabadi. Appl. Phys. Lett., 92 (25), 251501 (2008)
  10. T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, G. O'Sullivan. Appl. Phys. Lett., 99 (19), 191502 (2011)
  11. K. Fukugaki, S. Amano, A. Shimoura, T. Inoue, S. Miyamoto, T. Mochizuki. Rev. Sci. Instr., 77 (6), 063114 (2006)
  12. B.A. Hansson, O. Hemberg, H.M. Hertz, M. Berglund, H.J. Choi, B. Jacobsson, M. Wilner. Rev. Sci. Instr., 75 (6), 2122 (2004)
  13. A.N. Nechay, A.A. Perekalov, N.N. Salashchenko, N.I. Chkhalo. Opt. i spektr., 129 (2), 146 (2021) (in Russian)
  14. A.N. Nechay, A.A. Perekalov, N.N. Salashchenko, N.I. Chkhalo. Opt. i spektr., 129 (3), 266 (2021) (in Russian)
  15. A.N. Nechay, A.A. Perekalov, N.I. Chkhalo, N.N. Salashchenko. Opt. i spektr., 129 (6), 755 (2021) (in Russian)
  16. A.N. Nechai, A.A. Perekalov, N.I. Chkhalo, N.N. Salashchenko, I.G. Zabrodin, I.A. Kaskov, A.E. Pestov. Poverkhnost. Rentgenovskie, sinhrotronnye i nejtronnye issledovaniya (in Russian) 9, 83 (2019) (in Russian)
  17. B. Abel, J. Assmann, M. Faubel, K. Gabel, S. Kranzusch, E. Lugovoj, C. Peth. J. Appl. Phys., 95 (12), 7619 (2004)
  18. D.J. Pegg, P.M. Griffin, H.H. Haselton, R. Laubert, J.R. Mowat, R.S. Thoe, I.A. Sellin. Phys. Rev. A., 10 (3), 745 (1974)
  19. R.L. Kelly, L.J. Palumbo. Atomic and ionic emission lines below 2000 angstroms-hydrogen through krypton (Naval Research Lab, Washington DC, 1973)
  20. NIST Atomic Spectra Database, Gaithersburg, 2009-2019. https://www.nist.gov/pml/atomic- spectra-database
  21. B. Edlen. Z. Phys., 94 (1-2), 47 (1935)
  22. R.E. LaVilla. J. Chem. Phys., 57 (2), 899 (1972)
  23. H. Fiedorowicz, A. Bartnik, Z. Patron, P. Parys. Laser and Particle Beams, 12 (3), 471 (1994)
  24. L.I. Podobedova, D.E. Kelleher, W.L. Wiese. J. Phys. and Chem. Ref. Data, 38 (2), 171 (2009)
  25. H.G. Berry, J. Desesquelles, K.T. Cheng, R.M. Schectman. Phys. Rev. A, 18 (2), 546 (1978)
  26. M. Muller, T. Mey, J. Niemeyer, M. Lorenz, K. Mann. AIP Conf. Proc., 1764 (1), 030003 (2016)
  27. B.A.M. Hansson, H.M. Hertz. J. Phys. D., 37 (23), 3233 (2004).

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