Influence of neutron-doped phosphorus isotope on the microhardness of monocrystalline silicon
Makhkamov Sh.1, Tashmetov M. Yu.1, Erdonov M. N. 1, Ismatov N. B.1, Makhmudov Sh. А.1, Nazarmamatov Sh. M.1, Kholmedov Kh. M.2
1Institute of Nuclear Physics, Uzbek Academy of Sciences, Tashkent, Uzbekistan
2Tashkent Al-Khwarizmi University of Information Technologies, Tashkent, Uzbekistan
Email: rdonov@inp.uzmuzaffarerdonov1978@yandex.ru
The change in microhardness of initial n- and p-type silicon containing phosphorus and boron impurities during neutron transmutation was investigated. It was found that doping silicon with the stable isotope 31P, regardless of the phosphorus content in the original crystal, leads to an increase in the microhardness of n-Si<P>. For p-type silicon containing boron impurities, microhardness is determined by the ratio of boron and 31P isotope concentrations. It was established that in p-Si<B>, an increase in microhardness of neutron-transmutation p-type silicon is observed when the concentration ratio N31P/NB>1. The mechanism of transformation of radiation-induced and intrinsic defects responsible for the change in microhardness of n- and p-type silicon during neutron transmutation is discussed. Keywords: monocrystalline silicon, impurity, neutron-transmutation silicon, doping, isotope 31P, concentration, microhardness.
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