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Sputtering and ripples formation by gas cluster ions on LiNbO3 crystal
Russian version
DOI: 10.21883/PSS.2022.10.54237.384
Ieshkin A. E. 1, Ilina T. S. 2, Kiselev D. A. 2, Senatulin B. R. 2, Skryleva E. A. 2, Suchaneck G. 3, Parkhomenko Yu. N.2
1Lomonosov Moscow State University, Moscow, Russia
2National University of Science and Technology MISiS, Moscow, Russia
3Solid-State Electronics Laboratory, TU Dresden, Dresden, Germany
Email: ieshkin@physics.msu.ru, ilina.tatina@gmail.com, dm.kiselev@misis.ru, senatulin.br@misis.ru, easkryleva@gmail.com, gunnar.suchaneck@tu-dresden.de
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The work addresses the creation of surface structures on lithium niobate single crystals. Surface topography of lithium niobate surface sputtered with gas cluster ion beams was investigated. Surface ripples induced on the surface were analyzed using power spectral density functions approach, their evolution with ion fluence and their dependence on the cluster ion energy discussed. Sputter yield value was shown to decrease with surface roughness increase, the reasons of the effect are indicated. Local piezoresponse of the rippled surface was studied. Keywords: ferroelectrics, LiNbO3 crystal, gas cluster ions, self-organization, AFM, PSD function.
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