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Deformation of crystal lattice in rotational submicron lead zirconate titanate films
Russian version
Pronin I. P. 1, Kaptelov E. Yu. 1, Senkevich S. V. 1, Staritsyn M. V. 2, Ryzhov I. V. 3, Pronin V. P. 3
1Ioffe Institute, St. Petersburg, Russia
2Central Research Institute of Structural Materials Prometey, National Research Centre Kurchatov Institute, St. Petersburg, Russia
3Herzen State Pedagogical University of Russia, St. Petersburg, Russia
Email: Petrovich@mail.ioffe.ru, Kaptelov@mail.ioffe.ru, SenkevichSV@mail.ioffe.ru, ms_145@mail.ru, igoryzhov@yandex.ru, Pronin.v.p@yandex.ru
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This paper examines the growth characteristics and microstructure of lead zirconate titanate spherulitic films formed by two-stage RF magnetron sputtering. The films' composition corresponded to the morphotropic phase boundary region. Two growth mechanisms for perovskite islands were identified, characterized by stepwise and monotonic growth. These differences are believed to be related to the mechanisms of noncrystalline and crystalline low-angle branching. It is shown that the rate of lattice rotation increases sharply with decreasing film thickness, and for film thicknesses below 400-500 nm, plastic deformation is added to elastic deformation. Keywords: thin PZT films, spherulitic microstructure, lateral mechanical stresses, lattice rotation mechanisms.
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