Physics of the Solid State
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Formation and study of metal-insulator-semiconductor structures based on hafnium oxide films
Afanasiev M. S.
1, Belorusov D. A.
1, Kiselev D. A.
1, Luzanov V. A. 1, Chucheva G. V.
1
1Fryazino Branch, Kotel’nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Fryazino, Moscow oblast, Russia
Email: gvc@ms.ire.rssi.ru, dm.kiselev@gmail.com
Films of hafnium oxide (HfO2) were synthesized on a silicon substrate by magnetron sputtering of a target with a similar composition. The results of studies of the structural composition of HfO2 films and the electrical properties of metal-insulator-semiconductor (Ni-HfO_2-n-Si) structures are presented Keywords: Metal-dielectric-semiconductor (MDS) structures, hafnium oxide (HfO2) ferroelectric films, piezoelectric response, microstructure, electrical properties.
- C.-H. Lee, S.-H. Hur, Y.-C. Shin, J.-H. Choi, D.-G. Park, K. Kim. Appl. Phys. Lett. 86, 152908 (2005)
- D.A. Abdullaev, R.A. Milovanov, R.L. Volkov, N.I. Borgardt, A.N. Lantsev, K.A. Vorotilov, A.S. Sigov. Russ. Technol. J. 8, 5, 44 (2020)
- T. Mikolajick, S. Slesazeck, H. Mulaosmanovic, M.H. Park, S. Fichtner, P.D. Lomenzo, M. Hoffmann, U. Schroeder. J. Appl. Phys. 129, 100901 (2021)
- R. Guo, Z. Wang, S. Zeng, K. Han, L. Huang, D.G. Schlom, T. Venkatesan, Ariando, J. Chen. Sci. Rep. 5, 12576 (2015)
- E.I. Goldman, D.A. Belorusov, G.V. Chucheva. Ceram. Int. 47, 15, 21248 (2021)
- D.A. Belorusov, E.I. Goldman, G.V. Chucheva. Physics of the Solid State 64, 13, 2140 (2022)
- R. Shirota. In: Advances in Non-Volatile Memory and Storage Technology / Ed. Blanka Magyari-Kope, Yoshio Nishi. Woodhead Publishing, Philadelphia (2019). P. 283
- W. Banerjee, A. Kashir, S. Kamba. Small 18, 23, 2107575 (2022)
- A. Dkhissi, A. Esteve, C. Mastail, S. Olivier, G. Mazaleyrat, L. Jeloaica, M. Djafari Rouhani. J. Chem. Theor. Comput. 4, 1915 (2008)
- A.P. Huang, Z.C. Yang, P.K. Chu. In: Advances in Solid State Circuits Technologies / Ed. P.K. Chu. In-Tech, Vukovar. (2010). P. 333
- A. Chouprik, A. Chernikova, A. Markeev, V. Mikheev, D. Negrov, M. Spiridonov, S. Zarubin, A. Zenkevich. Microelectron. Eng. 178, 250 (2017)
- E.I. Goldman, A.G. Zhdan, G.V. Chucheva. Instruments and Experimental Techniques 40, 6, 841 (1997)
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