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Planar ensembles of multilayer film microelements based on Cu/FeNi components
Russian version
DOI: 10.21883/PSS.2022.09.54159.10HH
Melnikov G. Yu.1, Lepalovsky V. N.1, Svalov A. V.1, Lazpita P.2, Buznikov N. A.3, Kurlyandskaya G. V.1,2
1Ural Federal University after the first President of Russia B.N. Yeltsin, Yekaterinburg, Russia
2University of the Basque Country UPV/EHU, Department of Electricity and Electronics, Leioa, Spain
3Scientific Research Institute of Natural Gases and Gas Technologies, Gazprom VNIIGAZ, Razvilka, Moscow Region, Russia
Email: grisha2207@list.ru
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Planar ensembles of multilayer periodic square microelements of the type [Cu(6 nm)/FeNi(100 nm)]5 were obtained by ion-plasma sputtering on glass substrates using mesh copper masks. The surface features of trace elements were analyzed using a stylus profilometer, optical and scanning electron microscopy. Static magnetic properties and features of the magnetic domain structure were studied using the magneto-optical Kerr effect. The resulting planar ensembles can be used as an integral part of the film elements of weak magnetic field detectors operating on the basis of magnetic impedance (MI) to increase the sensitivity of the MI response to an external magnetic field. Keywords: multilayer film structures, ensembles of trace elements, periodic structures, giant magnetoimpedance effect. Keywords: multilayer film structures, ensembles of trace elements, periodic structures, giant magnetoimpedance effect.
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