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Boron based x-ray multilayer mirrors for the spectral range 6.7-9 nm
Russian version
Shaposhnikov R. A.1, Zagaynov N.V.1, Polkovnikov V. N.1, Chkhalo N. I.1, Garakhin S. A.1, Zuev S. Yu.1
1Institute for physics of microstructure RAS, Nizhny Novgorod, Russia
Email: shaposhnikov-roma@mail.ru
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The paper presents the results of a study of the reflective characteristics and structural parameters of multilayer X-ray mirrors based on a pair of Ru/B4C materials, optimized for the spectral range 67-90 Angstrem. A comparison of these structures with Mo/B4C and La/B4C mirrors is presented. Keywords: multilayer X-ray mirrors, synchrotron applications, X-ray monochromators, X-ray lithography.
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