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Features of gettering during irradiation of Cr /4H-SiC photodetectors with argon ions
Russian version
Kalinina E. V.1, Nikitina I. P.1, Kudoyarov M. F.1, Patrova M. Ya.1, Zabrodsky V. V.1, Yusupova Sh. A.1
1Ioffe Institute, St. Petersburg, Russia
Email: evk@mail.ioffe.ru
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The paper presents the results of the effect of stepwise irradiation 7 times with argon (Ar) ions with an energy of 53 MeV and a fluence of 1·1010 cm-2 (total fluence 7·1010 cm-2) on the structural and optical characteristics of ultraviolet Cr/4H-SiC photodetectors. It is shown that the features of the spectral characteristics in the range of 200-400 nm are determined by gettering of simple radiation defects of vacancy nature by cluster formations in 4H-SiC. The cyclic nature of the gettering effect was confirmed during successive seven-fold irradiation of Cr/4H-SiC photodetectors with argon ions with a fluence of 7·1010 cm-2, which was first observed with proton irradiation. Keywords: Silicon carbide, irradiation, argon, gettering, external quantum efficiency, X-ray.
  1. A. Goetzberger, W. Shockley. J. Appl. Phys., 31 (10), 1821-1824 (1960). DOI: 10.1063/1.1735455
  2. T.M. Buck, K.A. Pickar, J.M. Poate, C.-M. Hsieh. Appl. Phys. Lett., 21 (10), 485-487 (1972). DOI: 10.1063/1.1654228
  3. K. Nagasawa, Y. Matsushita, A. Kushino. Appl. Phys. Lett., 37 (7), 622-624 (1980). DOI: 10.1063/1.91998
  4. V.A. Perevoshchikov, V.D. Skupov. Getterirovanie primesey i defektov v poluprovodnikakh (Publ. of Nizhny Novgorod University, N. Novgorod, 2002), p. 1, ch. 3
  5. J.R. Monkowski. Sol. St. Technology, 7, 44-51 (1981)
  6. G.Z. Nemtsev, A.I. Pekarev, Yu.D. Chistyakov. Mikroelektronika, 12 (5), 432-439 (1983) (in Russian)
  7. T.E. Seidel, L. Meck, A.G. Cullis. J. Appl. Phys., 46 (2), 600-601 (1975)
  8. K.A. Gatsoev, A.T. Gorelenok, S.L. Karpenko, V.V. Mamutin, R.P. Seisyan. FTP, 17 (12), 2148-2151 (1983)
  9. S.I. Larikov, A.I. Petrov, O.V. Rychkov, A.E. Yunovich. ZhTF, 12 (6), 328-331 (1986)
  10. W. Korber, D. Weber, A. Hahgleiter, K.W. Benz, W.H. Ennen, H.D. Molleret. J. Cryst. Growth, 79 (1-3), 741-744 (1986). DOI: 10.1016/0022-0248(86)90548-8
  11. V.K. Kiselyov, S.V. Obolensky, V.D. Skupov. ZhTF, 69 (6), 129-131 (1999) (in Russian)
  12. H.S. Geipl, W.K. Tice. Appl. Phys. Lett., 30 (7), 325-327 (1977). DOI: 10.1063/1.89385
  13. T.W. Sigson, L. Cspredi, I.W. Mayer. J. Electrochem. Soc., 123 (7), 1116-1117 (1976). DOI: 10.1149/1.2133007
  14. E. Kalinina, G. Kholujanov, V. Solov'ev, A. Strel'chuk, V. Kossov, R. Yafaev, A. Kovarskii, A. Shchukarev, S. Obyden, G. Saparin, P. Ivannikov, A. Hallen, A. Konstantinov. Appl. Surf. Science, 184, 323-329 (2001). DOI: 10.1016/S0169-4332(01)00682-1
  15. E.V. Kolesnikova, E.V. Kalinina, A.A. Sitnikova, M.V. Zamoryanskaya, T.P. Popova. Solid State Phenomena, 131--133, 53-58 (2008). DOI: 10.4028/www.scientific.net/SSP.131-133.53
  16. E. Kalinina, G. Kholujanov, A. Sitnikova, V. Kossov, R. Yafaev, G. Pensl, S. Reshanov, A. Hallen, A. Konstantinov. Mat. Sci. Forum, 433--436, 637-640 (2003). DOI: 10.4028/www.scientific.net/MSF.433-436.637
  17. E.V. Kalinina. FTP, 41 (7), 769 (2007) (in Russian)
  18. E.V. Kalinina, G.N. Violina, I.P. Nikitina, E.V. Ivanova, V.V. Zabrodsky, M.Z. Schwartz, S.A. Levina, A.V. Nikolaev. FTP, 54 (2), 196-202 (2020) (in Russian). DOI: 10.21883/0000000000
  19. I.P. Nikitina, E.V. Kalinina, V.V. Zabrodsky. ZhTF, 93 (4), 562-567 (2023) (in Russian). DOI: 10.21883/TP.2023.04.55945.259-22
  20. M.A. Chumak, E.V. Kalinina, V.V. Zabrodsky. ZhTF, 95 (6), 1157 (2025) (in Russian). DOI: 10.61011/JTF.2025.06.60465.356-2
  21. E.V. Kalinina, M.F. Kudoyarov, I.P. Nikitina, E.V. Ivanova, V.V. Zabrodsky. FTP, 54 (11), 1244 (2020) (in Russian). DOI: 10.1134/S1063782620110123
  22. E.V. Kalinina, M.F. Kudoyarov, I.P. Nikitina, E.V. Dement'eva, V.V. Zabrodsky. FTP, 56 (2), 254 (2022) (in Russian). DOI: 10.1134/S1063782622020087
  23. D. Hull. Introduction to dislocations (Atomizdat, Moscow, 1968), p. 118
  24. G. Alfieri, A. Mihaila, H.M. Ayedh, B.G. Svensson, P. Hazdra, P. Godignon, J. Mikkan, S. Kicin. Mat. Sci. Forum, 858, 308-311 (2016). DOI: 10.4028/www.scientific.net/MSF.858.308
  25. P. Kumar, M. Belanche, N. Fur, L. Guzenko, J. Woerle, M.E. Bathen, U. Grossner. Mat. Sci. Forum, 1092, 187-193 (2023). DOI: 10.4028/p-Oy444y
  26. T.V. Blank, Y.A. Goldberg, O.V. Konstantinov. Nuclear Instr. and Methods in Physics Research A, 509, 109 (2003). DOI: 10.1016/S0168-9002(03)01558-4
  27. T.V. Blank, Yu.A. Goldberg, E.V. Kalinina, O.V. Konstantinov, A.O. Konstantinov, A. Hallen. Semicond. Sci. Technol., 20, 710-715 (2005). DOI: 10.1088/0268-1242/20/8/010
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