Study of the incorporation of group V atoms into arsenide-phosphide solid solutions grown by vapor-phase epitaxy using (CH3)3As as an arsenic source
Gavrilov K. A.
1, Mintairov S. A.1, Nadtochy A. M.1, Salii R. A.1, Kalyuzhnyy N. A.1
1Ioffe Institute, St. Petersburg, Russia
Email: gawrilowk@yandex.ru
In this paper, we consider the prospects of using trimethylarsine as an alternative source of arsenic atoms in metal-organic vapor-phase epitaxy of arsenide-phosphide solid solutions. Using InAsyP1-y as an example, we show that when using trimethylarsine, the arsenic concentration in the solid phase is less affected by fluctuations in the growth parameters (composition of the gas mixture) than when using a standard arsenic source - arsine. Keywords: MOVPE, trimethylarsine, TMAs, solid solutions, epitaxy.
- M.A. Mintairov, N.A. Kalyuzhnyy, V.V. Evstropov, V.M. Lantratov, S.A. Mintairov, M.Z. Shvarts, V.M. Andreev, A. Luque. IEEE J. Photovolt., 5, 1229 (2015)
- S.R. Kurtz, D. Myers, J.M. Olson. Proc. 26th IEEE Photovolt. Spec. Conf., 875 (1997)
- A. Gonzalo, L. Stanojevic, D. Fuertes Marron, A. Guzman, A. Hierro, J.M. Ulloa. Solar Energy, 221, 307 (2021)
- I. Garcia, M. Ochoa, I. Lombardero, L. Cifuentes, M. Hinojosa, P. Cano, I. Rey-Stolle, C. Algora, A. Johnson, I. Davies, K.H. Tan, W.K. Loke, S. Wicaksono, S.F. Yoon. Progr. Photovolt. Res. Appl., 25 (11), 887 (2017)
- A.V. Andreev. Sovrem. elektronika, N 6, 20 (2014). (in Russian)
- R.Kh. Akchurin, A.A. Marmalyuk. MOS-gidridnaya epitaksiya v tekhnologii materialov fotoniki i elektroniki (M., Tekhsfera, 2020). (in Russian)
- L. Samuelson, P. Omling, H.G. Grimmeiss. J. Cryst. Growth, 61, 425 (1983)
- M. Razeghi. The MOCVD Challenge Volume 1: A Survey of GaInAsP-InP for Photonic and Electronic Applications (Techno House, 1989)
- G.B. Stringfellow. Organometallic Vapor-Phase Epitaxy: Theory and Practice. 2nd ed. (Academic Press, 1999) 572 p
- R.M. Lum, J.K. Klingert, D.W. Kisker, S.M. Abys, F.A. Stevie. J. Cryst. Growth, 89, 137 (1988)
- M.A. Malik, M. Afzaal P. O'Brien. Chem. Rev., 110, 4417 (2010)
- I. Vurgaftman, J.R. Meyer, L.R. Ram-Mohan. J. App. Phys., 89 (11), 5815 (2001)
- M. Weyers, K. Shiraishi. Jpn. J. Appl. Phys., 31, 2483 (1992)
- H. Ito, T. Ishibashi. Jpn. J. Appl. Phys., 30, L944 (1991)
- R.M. Lum, J.K. Klingert. J. Cryst. Growth, 107, 290 (1991)
Подсчитывается количество просмотров абстрактов ("html" на диаграммах) и полных версий статей ("pdf"). Просмотры с одинаковых IP-адресов засчитываются, если происходят с интервалом не менее 2-х часов.
Дата начала обработки статистических данных - 27 января 2016 г.