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Transformation of the circular zone during thermal migration in silicon in the direction <100>
Seredin B.M.
1, Popov V. P.
1, Malibashev A. V.
1, Stepchenko A. D.
1
1Platov State Polytechnic University, Novocherkassk, Rostov oblast, Russia
Email: seredinboris@gmail.com, popov-npi@yandex.ru, a_malib@mail.ru, Stepchenko.A.D@yandex.ru
Aluminum-based circular zones make it possible to form a system of through-closed epitaxial channels of p-type conductivity in a silicon wafer without crossing adjacent zones, which eliminates the possibility of zone rupture characteristic of intersecting linear zones and increases the reproducibility of the thermomigration method. The peculiarities of the transformation of ring zones at various stages of migration in silicon in the direction <100> have been experimentally revealed. The observed changes in the shape of the zones and epitaxial channels are due to the asymmetry of the dissolution front of the liquid zone caused by the features of the cut caused by the bending of the linear zone. At the same time, the cutting of the singular planes of the inner contour of the zone is suppressed and preserved on the outer one. Keywords: Thermomigration, temperature gradient, silicon.
- W.G. Pfann. Zone Melting (Wiley, N.Y., 1963)
- V.N. Lozovsky, L.S. Lunin, V.P. Popov. Zonnaya perekristallizatsiya gradientom temperatury poluprovodnikovykh materialov (Moscow, Metallurgy, 1987). (in Russian)
- S. Pawar, K.P. Wang, A. Yeckel, J.J. Derby. Acta Mater., 228, 117780 (2022). https://doi.org/10.1016/j.actamat.2022.117780
- S.I. Garmashov. J. Cryst. Growth, 627, 127532 (2024). https://doi.org/10.1016/j.jcrysgro.2023.127532
- O.S. Polukhin, V.V. Kravchina. Technol. Design Electron. Equipment, 1-2, 34 (2023). http://dx.doi.org/10.15222/TKEA2023.1-2.34
- T.R. Anthony, J.K. Boah, M.F. Chang, H.E. Cline. IEEE Trans. Electron Dev., 23 (8), 818 (1976). DOI: 10.1109/T-ED.1976.18492
- B.M. Seredin, V.P. Popov, A.V. Malibashev, I.V. Gavrus, S.M. Loganchuk, S.Y. Martyushov. Silicon, 16, 3453 (2024). DOI: 10.1007/s12633-024-02921-0
- B.M. Seredin, V.P. Popov, A.V. Malibashev. Pis'ma ZhTF, 50 (7), 17 (2024). (in Russian). DOI: 10.61011/PJTF.2024.07.57463.19805
- B.M. Seredin, V.P. Popov, A.V. Malibashev, I.V. Gavrus, A.A. Skidanov. RF Patent 2805459 (2023). (in Russian)
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