Mitulinsky A. S.1, Gaydaychuk A. V.1, Zenkin S. P.1, Pirozhkov A. V.1, Linnik S. A.1
1Tomsk Polytechnic University, Tomsk, Russia
Email: mitulinsky@tpu.ru
Aluminum oxide exists in several polymorphic modifications, each of which determines a specific set of properties important for protective, thermal barrier, and dielectric coatings. The temperature evolution of the phase composition and microstructure of CVD-deposited Al2O3 coatings obtained from aluminum isopropoxide was investigated during annealing up to 1200 oC. X-ray diffraction and electron microscopy data were correlated to reveal the mechanisms of crystallization and the formation of various polymorphic modifications of Al2O3. Keywords: chemical vapor deposition, thin films, aluminum oxide, corundum, thermal stability.
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