Probe methods of diagnostics of parameters of induction-coupled plasma maintained in a volatile halide gas mix
Preobrazhensky E. I.
1, Sintsov S. V.
1,2, Vodopyanov A. V.
1,2
1Federal Research Center A.V. Gaponov-Grekhov Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
2Lobachevsky University of Nizhny Novgorod, Nizhny Novgorod, Russia
Email: evgenypr@ipfran.ru
In this paper, the results of the measurement of the local electron energy distribution function in an induction-coupled plasma discharge maintained in a flow of volatile halides at low-pressure are presented. A moveable electric probe with a short exposure time in plasma was used, which significantly reduces the erosive effect of the chemical active medium on the electrodes. Numerical methods of processing volt-ampere characteristics are discussed, which make it possible to identify the features of the electron energy distribution function in a high-energy region.. Keywords: plasma, electrical probes, halides, plasma chemistry.
- L.S. Polak, A.A. Ovsyannikov, D.I. Slovetskii, F.B. Vurzel', Teoreticheskaya i prikladnaya plazmokhimiya (Nauka, M., 1975) (in Russian)
- L.V. Shabarova, P.G. Sennikov, R.A. Kornev, A.D. Plekhovich, A.M. Kut'in, High Energy Chem., 53 (6), 482 (2019). DOI: 10.1134/S0018143919060146
- A. Bogaerts, C. De Bie, M. Eckert, V. Georgieva, T. Martens, E. Neyts, S. Tinck, Pure Appl. Chem., 82 (6), 1283 (2010). DOI: 10.1351/PAC-CON-09-09-20
- R.H. Huddlestone, S.L. Leonard, Plasma diagnostic techniques (Academic Press, 1965)
- V.A. Godyak, V.I. Demidov, J. Phys. D: Appl. Phys., 44 (23), 233001 (2011). DOI: 10.1088/0022-3727/44/23/233001
- V.N. Ochkin, Spektroskopiya nizkotemperaturnoi plazmy (Fizmatlit, M., 2006), (in Russian)
- A. Vodopyanov, D. Mansfeld, S. Sintsov, M. Viktorov, J. Phys.: Conf. Ser., 1400, 077022 (2019). DOI: 10.1088/1742-6596/1400/7/077022
- M.A. Pedrosa, A. Lopez-Sanchez, C. Hidalgo, A. Montoro, A. Gabriel, J. Encabo, J. de la Gama, L.M. Martinez, E. Sanchez, R. Perez, C Sierra, Rev. Sci. Instrum., 70 (1), 415 (1999). DOI: 10.1063/1.1149350
- R.Y. Solomatin, S.A. Grashin, VANT. Ser. Termoyad. Sint., 40 (2), 55 (2017). (in Russian). DOI: 10.21517/0202-3822-2017-40-2-55-60
- S. Sintsov, D. Mansfeld, E. Preobrazhensky, R. Kornev, N. Chekamrev, M. Viktorov, A. Ermakov, A. Vodopyanov, Plasma Chem. Plasma Process., 42 (6), 1237 (2022). DOI: 10.1007/s11090-022-10280-0
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